Plasma‐based synthesis of iron carbide nanoparticles
2020; Wiley; Volume: 17; Issue: 11 Linguagem: Inglês
10.1002/ppap.202000105
ISSN1612-8869
AutoresHana Libenská, Jan Hanuš, Tereza Košutová, Milan Dopita, Ondřej Kylián, Miroslav Cieslar, Andrei Choukourov, Hynek Biederman,
Tópico(s)Copper Interconnects and Reliability
ResumoAbstract In this study, iron carbide nanoparticles (NPs) were prepared by the plasma‐based method using a gas aggregation source of NPs. In‐flight plasma treatment of the NPs was performed to improve their temporal stability. The auxiliary radiofrequency plasma used for the in‐flight treatment resulted in trapping of the NPs in the plasma for several 10s of seconds. Scanning electron microscopy and small‐angle X‐ray scattering analyses showed a decrease in the size of NPs due to the plasma treatment, whereas the X‐ray diffraction analysis showed that the structure of the NPs changed from amorphous iron carbide to the crystalline Fe 3 C (cementite). In situ and ex situ X‐ray photoelectron spectroscopy measurement confirmed better temporal stability of plasma‐treated NPs against oxidation.
Referência(s)