Portal de Periódicos da CAPES

Formation of a plano-convex micro-lens array in fused silica glass by using a CO2 laser-assisted reshaping technique

2016; Springer Science+Business Media; Volume: 69; Issue: 3 Linguagem: Inglês

10.3938/jkps.69.335

1976-8524

Ik‐Bu Sohn, Dongyoon Yoo, Young-Chul Noh, Jae-Hee Sung, Seong-Ku Lee, Hun-Kook Choi, Md. Shamim Ahsan,

Laser Material Processing Techniques

We report on fabricating high-fill-factor plano-convex spherical and square micro-lens arrays on fused silica glass surface using CO2 laser assisted reshaping technique. Initially, periodic micro-pillars have been encoded on the glass surface by means of a femtosecond laser beam. Afterwards, the micro-pillars are polished several times by irradiating a CO2 laser beam on top of the micro-pillars. Consequently, spherical micro-lens array with micro-lens size of 50 um x 50 um and square micro-lens array with micro-lens size of 100 um x 100 um are formed on fused silica glass surface. We also study the intensity distribution of light passed through the spherical micro-lens array engraved glass sample. The simulation result shows that, the focal length of the spherical micro-lens array is 35 um. Furthermore, we investigate the optical properties of the micro-lens array engraved glass samples. The proposed CO2 laser based reshaping technique is simple and fast that shows promises in fabrication arrays of smooth micro-lenses in various transparent materials.