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Fabrication of Ge2Sb2Te5 metasurfaces by direct laser writing technique

2021; Elsevier BV; Volume: 141; Linguagem: Inglês

10.1016/j.optlastec.2021.107124

1879-2545

Daria V. Bochek, K. B. Samusev, D. A. Yavsin, Mikhail V. Zhukov, M. F. Limonov, Mikhail V. Rybin, Ivan I. Shishkin, Artem D. Sinelnik,

Photonic Crystals and Applications

We experimentally demonstrate fabrication of tunable high contrast periodic fishnet metasurfaces with 3 um period on 200 nm thick Ge2Sb2Te5 films sputted onto glass and sapphire substrates using direct laser writing technique. We find that the use of sapphire substrate provides better accuracy of metasurface segments due to high thermal conductivity. The advantages of the demonstrated method consist in its simplicity, rapidity, robustness, and the ability of tuning of fabricated structures. This is of crucial importance for the creation of robust and tunable metasurfaces for applications in the field of telecommunications and information processing.