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Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy

2021; IOP Publishing; Linguagem: Inglês

10.1088/2053-1583/abdbcb

2053-1583

Patrick R. Whelan, Binbin Zhou, Odile Bezencenet, Abhay Shivayogimath, Neeraj Mishra, Qian Shen, Bjarke S. Jessen, Iwona Pasternak, David M. A. Mackenzie, Jie Ji, Cunzhi Sun, Pierre Sénéor, Bruno Dlubak, Birong Luo, Frederik Westergaard Østerberg, Deping Huang, Haofei Shi, Da Luo, Meihui Wang, Rodney S. Ruoff, Ben Conran, C. McAleese, Cedric Huyghebaert, Steven Brems, Timothy J. Booth, Ilargi Napal, Wlodzimierz Strupinskii, Dirch Hjorth Petersen, Stiven Forti, Camilla Coletti, Alex Jouvray, K. B. K. Teo, Alba Centeno, Amaia Zurutuza, P. Legagneux, Peter Uhd Jepsen, Peter Bøggild,

Photonic and Optical Devices

Graphene metrology needs to keep up with the fast pace of developments in graphene growth and transfer. Terahertz time-domain spectroscopy (THz-TDS) is a non-contact, fast, and non-destructive characterization technique for mapping the electrical properties of graphene. Here we show several case studies of graphene characterization on a range of different substrates that highlight the versatility of THz-TDS measurements and its relevance for process optimization in graphene production scenarios.