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Study of the Microstrip Waveguide Prototype Model for Use as a Retunable Diffraction Grating

2021; Springer Nature; Linguagem: Inglês

10.1007/978-981-33-6632-9_39

2190-3026

Dmitry M. Nikulin, Valery Reichert, С. Л. Шергин, Igor N. Karmanov, Vladimir S. Korneyev, Polina A. Zvyagintseva,

Advanced MEMS and NEMS Technologies

The prototype model (hereinafter—the prototype) with strip micromechanical waveguides in a free state with piezoelectric oscillation excitation was studied. The study methodology for the basic functional characteristics of the prototype with strip micromechanical waveguides in a free state was developed. The test bench was made. Visual inspection of the prototype model was performed and its quality was assessed using microscope. Tests on the prototype model were carried out. Diffraction patterns of light reflected from a flexural wave in waveguides at different frequencies of mechanical excitation were obtained. Diffraction patterns were analyzed.