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Temperature dependence of the piezoresistance effects of p‐type silicon diffused layers

1983; Wiley; Volume: 103; Issue: 5 Linguagem: Inglês

10.1002/eej.4391030503

1520-6416

Kazuji Yamada, Motohisa Nishihara, Satoshi Shimada, M. Tanabe, Michitaka Shimazoe,

Mechanical and Optical Resonators

Electrical Engineering in JapanVolume 103, Issue 5 p. 8-16 Article Temperature dependence of the piezoresistance effects of p-type silicon diffused layers Kazuji Yamada, Kazuji Yamada Naka Works, Hitachi, Ltd.Search for more papers by this authorMotohisa Nishihara, Motohisa Nishihara Naka Works, Hitachi, Ltd.Search for more papers by this authorSatoshi Shimada, Satoshi Shimada Naka Works, Hitachi, Ltd.Search for more papers by this authorMasanori Tanabe, Masanori Tanabe Naka Works, Hitachi, Ltd.Search for more papers by this authorMichitaka Shimazoe, Michitaka Shimazoe Naka Works, Hitachi, Ltd.Search for more papers by this author Kazuji Yamada, Kazuji Yamada Naka Works, Hitachi, Ltd.Search for more papers by this authorMotohisa Nishihara, Motohisa Nishihara Naka Works, Hitachi, Ltd.Search for more papers by this authorSatoshi Shimada, Satoshi Shimada Naka Works, Hitachi, Ltd.Search for more papers by this authorMasanori Tanabe, Masanori Tanabe Naka Works, Hitachi, Ltd.Search for more papers by this authorMichitaka Shimazoe, Michitaka Shimazoe Naka Works, Hitachi, Ltd.Search for more papers by this author First published: September/October 1983 https://doi.org/10.1002/eej.4391030503Citations: 9AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat References 1 C. S. Smith. Piezoresistance in germanium and silicon, Phys. Rev., Vol. 94, 42, 1954. 2 F. J. Morin, T. H. Geballf and C. Herring. Temperature dependence of the piezoresistance of high purity silicon and germanium, Phys. Rev., Vol. 105, 525, 1957. 3 O. N. Tufte and E. L. Stelzer. Piezoresistive properties of silicon diffused layers, J. Appl. Phys., Vol. 34, 313, 1963. 4 G. L. Bir and G. E. Pikus. Symmetry and strain-induced effects in semiconductors, John Wiley and Sons, 1974. 5 D. Long. Stress dependence of the piezoresistance effect, J. Appl. Phys., Vol. 32, 2050, 1961. 6 O. R. Kerr and A. G. Milnes. Piezoresistance of diffused layers in cubic semiconductors, J. Appl. Phys., Vol. 34, 727, 1963. 7 L. B. Wilner. A diffused silicon pressure transducer with stress concentrated at transverse gauges, ISA Trans., Vol. 17, 83, 1978. 8 K. Yamada, M. Nishihara, S. Shimada, M. Tanabe, M. Shimazoe and Y. Matsuoka. Nonlinearity of the piezoresistance effect of p-type silicon diffused layers, I.E.E.E. Trans. Electron Devices, Vol. ED-29, 71, 1982. 9 Nishihara, Shimada, Yamada, Tanabe, Matsuoka and Hokawa. Nonlinear analysis of semiconductor pressure sensor, J. Soc. Instrum. Centr. Eng., Vol. 17, 274, April 1981. 10 A. D. Kurts and C. L. Gravel. Semiconductor transducers using transverse and shear piezoresistance, Instrum. Soc. of America Conf., P 4–1-PHYMMID, Vol. 67, 1, 1967. 11 J. C. Irvin. Resistivity of bulk silicon and of diffused layers in silicon, Bell Syst. Tech. J., Vol. 41, 387, 1962. 12 Strength Design Data Book Editing Committee, Strength Design Data Book, Nov. 1962, Shokabo. 13 J. J. Wortman and R. A. Evans. Young's modulus, shear modulus, and Poisson's ratio in silicon and germanium, J. Appl. Phys., Vol. 36, 153, 1965. 14 Shimazoe, Yamada and Takahashi. Temperature characteristics of semiconductor strain gauge, Proc. Autumn Meeting Japan Soc. Applied Phys., 24-D-6, 1975. 15 W. G. Pfann and P. N. Thurston. Semiconducting stress transducers utilizing the transverse and shear piezoresistance effect, J. Appl. Phys., Vol. 32, 2009, 1961. Citing Literature Volume103, Issue5September/October 1983Pages 8-16 ReferencesRelatedInformation