Dependence of tribological properties on deposition parameters for non hydrogenated amorphous carbon films produced by magnetron sputtering
1995; Elsevier BV; Volume: 76-77; Linguagem: Inglês
10.1016/02578-9729(50)25995-
ISSN1879-3347
Autores Tópico(s)Lubricants and Their Additives
ResumoAmorphous carbon films have been deposited on various substrates by direct current (DC) magnetron sputtering from a graphite target in an argon discharge. The composition and physical properties of films (mass density, morphology, electrical resistivity, residual stresses) were investigated as functions of the argon pressure and negative substrate bias voltage. The friction properties of 2 μm thick carbon films deposited on polished stainless steel substrates at various argon pressures and substrate bias voltages were determined by alumina ball-on-disk tribological tests performed in dry air under a load of 4.9 N with a sliding velocity of 10 m min−1 for 105 cycles. The tribological behavior and friction performance of carbon coated disks are discussed in connection with the deposition parameters and physical properties of non hydrogenated amorphous carbon films.
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