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Effects of sputtering on the surface of graphite

1870; Wiley; Volume: 3; Issue: 2 Linguagem: Inglês

10.1111/j.1365-2818.1870.tb06352.x

1747-3438

Nobuyuki Nakagiri, Yasunori Koga, Yasumichi Miyazaki,

Non-Destructive Testing Techniques

Journal of MicroscopyVolume 152, Issue 1 p. 245-250 Effects of sputtering on the surface of graphite Nobuyuki Nakagiri, Nobuyuki Nakagiri Yoshida NanoMechanism Project, JRDC, Tsukuba Research Consortium, No. 2 Satellite, 5-9-9 Tohkohdai, Tsukuba, Ibaraki 300-26, JapanSearch for more papers by this authorYasunori Koga, Yasunori Koga Yoshida NanoMechanism Project, JRDC, Tsukuba Research Consortium, No. 2 Satellite, 5-9-9 Tohkohdai, Tsukuba, Ibaraki 300-26, Japan Akashi Seisakusho, Ltd, 2–5020 Hironodai, Zama, Kanagawa 228, Japan.Search for more papers by this authorYasumichi Miyazaki, Yasumichi Miyazaki Yoshida NanoMechanism Project, JRDC, Tsukuba Research Consortium, No. 2 Satellite, 5-9-9 Tohkohdai, Tsukuba, Ibaraki 300-26, Japan Akashi Seisakusho, Ltd, 2–5020 Hironodai, Zama, Kanagawa 228, Japan.Search for more papers by this author Nobuyuki Nakagiri, Nobuyuki Nakagiri Yoshida NanoMechanism Project, JRDC, Tsukuba Research Consortium, No. 2 Satellite, 5-9-9 Tohkohdai, Tsukuba, Ibaraki 300-26, JapanSearch for more papers by this authorYasunori Koga, Yasunori Koga Yoshida NanoMechanism Project, JRDC, Tsukuba Research Consortium, No. 2 Satellite, 5-9-9 Tohkohdai, Tsukuba, Ibaraki 300-26, Japan Akashi Seisakusho, Ltd, 2–5020 Hironodai, Zama, Kanagawa 228, Japan.Search for more papers by this authorYasumichi Miyazaki, Yasumichi Miyazaki Yoshida NanoMechanism Project, JRDC, Tsukuba Research Consortium, No. 2 Satellite, 5-9-9 Tohkohdai, Tsukuba, Ibaraki 300-26, Japan Akashi Seisakusho, Ltd, 2–5020 Hironodai, Zama, Kanagawa 228, Japan.Search for more papers by this author First published: October 1988 https://doi.org/10.1111/j.1365-2818.1988.tb01385.xCitations: 7 AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat SUMMARY We present STM images of the sputtered surfaces of graphite after different sputtering times. The roughness (r.m.s.) and the peak-to-valley distance were calculated from the digitized STM signals. The roughness versus etching time graph shows that the roughness increases with etching time initially, but does not change with increased sputtering later. The peak-to-valley distance is proportional to the roughness with a coefficient of 8·7. The Fourier transform shows peaks corresponding to the size of mountains created on the sputtered surfaces. REFERENCES Binnig, G. & Rohrer, H. (1982) Scanning tunneling microscopy. Helv. Phys. Acta., 55, 726–735. CASWeb of Science®Google Scholar Binnig, G. & Rohrer, H. (1983) Scanning tunneling microscopy. Surf. Sci. 126, 236–244. 10.1016/0039-6028(83)90716-1 CASWeb of Science®Google Scholar Binnig, G., Rohrer, H., Gerber, Ch. & Weibel, E. (1982) Tunneling through a controllable vacuum gap. Appl. Phys. Lett. 40, 178–180. 10.1063/1.92999 CASWeb of Science®Google Scholar Feenstra, R.M. & Fein, A.P. (1985) Surface morphology of GaAs(110) by scanning tunneling microscopy. Phys. Rev. B, 32, 1394–1396. 10.1103/PhysRevB.32.1394 CASWeb of Science®Google Scholar Feenstra, R.M. & Oehrlein, G.S. (1985) Summary abstract: surface morphology of oxidized and ion-etched silicon by scanning tunneling microscopy. J. Vac. Sci. Technol. B3, 1136–1137. 10.1116/1.583068 Web of Science®Google Scholar Garcia, N., Baró, A.M., Miranda, R., Rohrer, H., Gerber, Ch., Cantú, Garcia R. & Peña, J.L. (1985) Surface roughness standards, obtained with the scanning tunneling microscope operated at atmospheric air pressure. Metrologia, 21, 135–138. 10.1088/0026-1394/21/3/005 Web of Science®Google Scholar Ichinokawa, T., Miyazaki, Y. & Koga, Y. (1987) Scanning tunneling microscope combined with scanning electron microscope. Ultramicroscopy, 23, 115–118. 10.1016/0304-3991(87)90232-4 Web of Science®Google Scholar Koga, Y., Miyazaki, Y. & Nakagiri, N. (1988) STM study of the effects of etching on the surface of Kish-Graphite. Japan. J. Appl. Phys. 27, L976–L978. 10.1143/JJAP.27.L976 CASWeb of Science®Google Scholar Citing Literature Volume152, Issue1October 1988Pages 245-250 ReferencesRelatedInformation