Changes of Morphological, Optical, and Electrical Properties Induced by Hydrogen Plasma on (0001) ZnO Surface
2022; Wiley; Volume: 219; Issue: 16 Linguagem: Inglês
10.1002/pssa.202270036
ISSN1862-6319
AutoresZ. Remeš, Anna Artemenko, Egor Ukraintsev, Dhananjay K. Sharma, M. Buryi, Alexander Kromka, Štěpán Potocký, Ondrej Szabó, Jaroslav Kuliček, Bohuslav Rezek, A. Poruba, Júlia Míčová, Hua‐Shu Hsu,
Tópico(s)Gas Sensing Nanomaterials and Sensors
Resumophysica status solidi (a)Volume 219, Issue 16 2270036 Section CoverFree Access Changes of Morphological, Optical, and Electrical Properties Induced by Hydrogen Plasma on (0001) ZnO Surface Zdenek Remes, Corresponding Author Zdenek Remes [email protected] orcid.org/0000-0002-3512-9256 FZU—Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Praha 8, CzechiaSearch for more papers by this authorAnna Artemenko, Anna Artemenko orcid.org/0000-0001-9884-0216 FZU—Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Praha 8, CzechiaSearch for more papers by this authorEgor Ukraintsev, Egor Ukraintsev orcid.org/0000-0002-9768-5119 FZU—Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Praha 8, CzechiaSearch for more papers by this authorDhananjay K. Sharma, Dhananjay K. Sharma orcid.org/0000-0002-7903-4099 FZU—Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Praha 8, CzechiaSearch for more papers by this authorMaksym Buryi, Maksym Buryi orcid.org/0000-0002-7529-255X FZU—Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Praha 8, CzechiaSearch for more papers by this authorAlexander Kromka, Alexander Kromka orcid.org/0000-0002-3531-6748 FZU—Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Praha 8, CzechiaSearch for more papers by this authorStepan Potocky, Stepan Potocky orcid.org/0000-0002-6989-4888 FZU—Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Praha 8, CzechiaSearch for more papers by this authorOndrej Szabo, Ondrej Szabo orcid.org/0000-0001-7784-9780 FZU—Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Praha 8, CzechiaSearch for more papers by this authorJaroslav Kulicek, Jaroslav Kulicek orcid.org/0000-0002-8600-7822 Faculty of Electrical Engineering, Czech Technical University in Prague, Technická 1902/2, 166 27 Praha 6 - Dejvice, CzechiaSearch for more papers by this authorBohuslav Rezek, Bohuslav Rezek orcid.org/0000-0002-0378-4598 Faculty of Electrical Engineering, Czech Technical University in Prague, Technická 1902/2, 166 27 Praha 6 - Dejvice, CzechiaSearch for more papers by this authorAles Poruba, Ales Poruba SVCS Process Innovation s. r. o., Zámecká 133, 757 01 Valašské Meziříčí, CzechiaSearch for more papers by this authorJulia Micova, Julia Micova orcid.org/0000-0002-2315-2803 Institute of Chemistry, Slovak Academy of Sciences, Dúbravská cesta 9, 84538 Bratislava, SlovakiaSearch for more papers by this authorHua Shu Hsu, Hua Shu Hsu Department of Applied Physics, National Pingtung University, No. 4-18, Minsheng Road, Pingtung, TaiwanSearch for more papers by this author Zdenek Remes, Corresponding Author Zdenek Remes [email protected] orcid.org/0000-0002-3512-9256 FZU—Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Praha 8, CzechiaSearch for more papers by this authorAnna Artemenko, Anna Artemenko orcid.org/0000-0001-9884-0216 FZU—Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Praha 8, CzechiaSearch for more papers by this authorEgor Ukraintsev, Egor Ukraintsev orcid.org/0000-0002-9768-5119 FZU—Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Praha 8, CzechiaSearch for more papers by this authorDhananjay K. Sharma, Dhananjay K. Sharma orcid.org/0000-0002-7903-4099 FZU—Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Praha 8, CzechiaSearch for more papers by this authorMaksym Buryi, Maksym Buryi orcid.org/0000-0002-7529-255X FZU—Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Praha 8, CzechiaSearch for more papers by this authorAlexander Kromka, Alexander Kromka orcid.org/0000-0002-3531-6748 FZU—Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Praha 8, CzechiaSearch for more papers by this authorStepan Potocky, Stepan Potocky orcid.org/0000-0002-6989-4888 FZU—Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Praha 8, CzechiaSearch for more papers by this authorOndrej Szabo, Ondrej Szabo orcid.org/0000-0001-7784-9780 FZU—Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Praha 8, CzechiaSearch for more papers by this authorJaroslav Kulicek, Jaroslav Kulicek orcid.org/0000-0002-8600-7822 Faculty of Electrical Engineering, Czech Technical University in Prague, Technická 1902/2, 166 27 Praha 6 - Dejvice, CzechiaSearch for more papers by this authorBohuslav Rezek, Bohuslav Rezek orcid.org/0000-0002-0378-4598 Faculty of Electrical Engineering, Czech Technical University in Prague, Technická 1902/2, 166 27 Praha 6 - Dejvice, CzechiaSearch for more papers by this authorAles Poruba, Ales Poruba SVCS Process Innovation s. r. o., Zámecká 133, 757 01 Valašské Meziříčí, CzechiaSearch for more papers by this authorJulia Micova, Julia Micova orcid.org/0000-0002-2315-2803 Institute of Chemistry, Slovak Academy of Sciences, Dúbravská cesta 9, 84538 Bratislava, SlovakiaSearch for more papers by this authorHua Shu Hsu, Hua Shu Hsu Department of Applied Physics, National Pingtung University, No. 4-18, Minsheng Road, Pingtung, TaiwanSearch for more papers by this author First published: 21 August 2022 https://doi.org/10.1002/pssa.202270036AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Graphical Abstract Hydrogen Plasma Plasma provides specific adjustment of solid-state surface properties offering an alternative to high temperature treatment. In article number 2100427, Zdenek Remes and co-workers study the hydrogen plasma treatment of monocrystalline ZnO surface in an inductively coupled plasma reactor with reduced capacitively coupled plasma mode. The surface properties strongly depend on the electrical potential of the holder during plasma treatment. Volume219, Issue16August 20222270036 RelatedInformation
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