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Scalable CMOS back-end-of-line-compatible AlScN/two-dimensional channel ferroelectric field-effect transistors

2023; Nature Portfolio; Volume: 18; Issue: 9 Linguagem: Inglês

10.1038/s41565-023-01399-y

1748-3395

Kwan‐Ho Kim, Seyong Oh, Merrilyn Mercy Adzo Fiagbenu, Jeffrey Zheng, Pariasadat Musavigharavi, Pawan Kumar, Nicholas Trainor, Areej Aljarb, Yi Wan, Hyong Min Kim, Keshava Katti, Seunguk Song, Gwangwoo Kim, Zichen Tang, Jui‐Han Fu, Mariam Hakami, Vincent Tung, Joan M. Redwing, Eric A. Stach, Roy H. Olsson, Deep Jariwala,

Ferroelectric and Piezoelectric Materials