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TEM Techniques for Semiconductor Failure Analysis

2023; Volume: 84758; Linguagem: Inglês

10.31399/asm.cp.istfa2023tpk1

ISSN

0890-1740

Autores

Sam Subramanian, Khiem Ly, Jacob Levenson, Tony Chrastecky,

Tópico(s)

Electron and X-Ray Spectroscopy Techniques

Resumo

Abstract Presentation slides for the ISTFA 2023 Tutorial session “TEM Techniques for Semiconductor Failure Analysis.”

Referência(s)