Voltar
Livro Revisado por pares
BIBTEX RIS

Micro Mechanical Transducers - Pressure Sensors, Accelerometers and Gyroscopes

2000; Elsevier BV; Linguagem: Inglês

10.1016/s1386-2766(00)x8001-2

ISSN

2542-6524

Autores

Minhang Bao,

Tópico(s)

Advanced MEMS and NEMS Technologies

Resumo

Preface. Chapter 1 - Introduction to micro mechanical transducers. Chapter 2 - Basic mechanics of beam and diaphragm structures. Chapter 3 - Air damping. Chapter 4 - Electrostatic driving and capacitive sensing. Chapter 5 - Piezoresistive sensing. Chapter 6 - Piezoresistive pressure transducers. Chapter 7 - Piezoresistive accelerometers. Chapter 8 - Capacitive pressure transducers and accelerometers. Chapter 9 - Resonant sensors and vibratory gyroscopes. Subject Index.

Referência(s)