Accurate Simulation of Pattern Transfer Processes Using Minkowski Operations (Special Issue on 1993 VLSI Process and Device Modeling Workshop (VPAD93))

Artigo Revisado por pares

1994; Institute of Electronics, Information and Communication Engineers; Volume: 77; Issue: 2 Linguagem: Inglês

ISSN

1745-1353

Autores

Ernst Strasser, G. Schrom, Karl Wimmer, S. Selberherr,

Tópico(s)

Manufacturing Process and Optimization

Ver no editor