Phase-Engineered Synthesis of Centimeter-Scale 1T′- and 2H-Molybdenum Ditelluride Thin Films
2015; American Chemical Society; Volume: 9; Issue: 6 Linguagem: Inglês
10.1021/acsnano.5b02511
ISSN1936-086X
AutoresJin Cheol Park, Seok Joon Yun, Hyun Kim, Ji Hoon Park, Sang Hoon Chae, Sung Jin An, Jeong‐Gyun Kim, Soo Min Kim, Ki Kang Kim, Young Hee Lee,
Tópico(s)Chalcogenide Semiconductor Thin Films
ResumoWe report the synthesis of centimeter-scale, uniform 1T'- and 2H-MoTe2 thin films via the tellurization of Mo thin films. 1T'-MoTe2 was initially grown and converted gradually to 2H-MoTe2 over a prolonged growth time under a Te atmosphere. Maintaining excessive Te was essential for obtaining the stable stoichiometric 2H-MoTe2 phase. Further annealing under a lower partial pressure of Te at the same temperature, followed by a rapid quenching, led to the reverse phase transition from 2H-MoTe2 to 1T'-MoTe2. The orientation of the 2H-MoTe2 film was determined by the tellurization rate. Slow tellurization was the key for obtaining a highly oriented 2H-MoTe2 film over the entire area, while fast tellurization led to a 2H-MoTe2 film with a randomly oriented c-axis.
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